화학공학소재연구정보센터
검색결과 : 12건
No. Article
1 Effects of dose on activation characteristics of P in Ge
Anisuzzaman M, Sadoh T
Thin Solid Films, 520(8), 3255, 2012
2 Susceptor-assisted microwave annealing for activation of arsenic dopants in silicon
Alford TL, Gadre MJ, Vemuri RNP, Theodore ND
Thin Solid Films, 520(13), 4314, 2012
3 Non-melting annealing of silicon by CO2 laser
Florakis A, Verrelli E, Giubertoni D, Tzortzis G, Tsoukalas D
Thin Solid Films, 518(9), 2551, 2010
4 Hydrogen and helium interactions in Si: phenomena obscure and not-so-obscure
Ashok S
Applied Surface Science, 244(1-4), 2, 2005
5 Theoretical investigations of complexes of p-type dopants and carbon interstitial in SiC: bistable, negative-U defects
Gali A, Hornos T, Deak P, Son NT, Janzen E, Choyke WJ
Materials Science Forum, 483, 519, 2005
6 Dopant activation after ion shower doping for the fabrication of low-temperature poly-Si TFTs
Kim DM, Kim DS, Ro JS
Thin Solid Films, 475(1-2), 342, 2005
7 Quantitative high-resolution two-dimensional profiling of SiC by scanning capacitance microscopy
Raineri V, Giannazzo F, Calcagno L, Musumeci P, Roccaforte F, La Via F
Materials Science Forum, 389-3, 655, 2002
8 Carrier concentrations in implanted and epitaxial 4H-SiC by scanning spreading resistance microscopy
Osterman J, Anand S, Linnarsson M, Hallen A
Materials Science Forum, 389-3, 663, 2002
9 Activation study of implanted N+ in 6H-SiC by scanning capacitance microscopy
Raineri V, Calcagno L, Giannazzo F, Goghero D, Musumeci F, Roccaforte F, La Via F
Materials Science Forum, 433-4, 375, 2002
10 Study on dopant activation of phosphorous implanted polycrystalline silicon thin films by KrF excimer laser annealing
Tseng CH, Lin CW, Teng TH, Chang TK, Cheng HC, Chin A
Solid-State Electronics, 46(8), 1085, 2002