검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Review of electrical characterization of ultra-shallow junctions with micro four-point probes Petersen DH, Hansen O, Hansen TM, Boggild P, Lin R, Kjaer D, Nielsen PF, Clarysse T, Vandervorst W, Rosseel E, Bennett NS, Cowern NEB Journal of Vacuum Science & Technology B, 28(1), C1C27, 2010 |
| 2 |
Sensitivity study of micro four-point probe measurements on small samples Wang F, Petersen DH, Hansen TM, Henriksen TR, Boggild P, Hansen O Journal of Vacuum Science & Technology B, 28(1), C1C34, 2010 |