검색결과 : 2건
No. | Article |
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1 |
Difference between C4F8 and C5F8 plasmas in surface reaction processes for selective etching of SiO2 over Si3N4 Motomura H, Imai S, Tachibana K Thin Solid Films, 374(2), 243, 2000 |
2 |
Concerted Reactions of Charge-Transfer and Covalent Bond Formation in Ionized Alkylbenzene-Isobutene Clusters - Copolymerization of Styrene-Isobutene and Alpha-Methylstyrene-Isobutene Clusters Elshall MS, Yu ZD Journal of the American Chemical Society, 118(51), 13058, 1996 |