검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Analysis of ion energy distribution at the substrate during a HPPMS (Cr,Al)N process using retarding field energy analyzer and energy resolved mass spectrometer Bobzin K, Brogelmann T, Brugnara RH, Chromy S Thin Solid Films, 596, 140, 2015 |
| 2 |
Chemiluminescence detection systems for the analysis of explosives Jimenez AM, Navas MJ Journal of Hazardous Materials, 106(1), 1, 2004 |
| 3 |
Development of the quadruple mass spectrometer with bessel-box type energy analyzer for the accurate measurement of partial pressures Takahashi N, Yanagishita K, Hayashi T, Akimichi H, Tuzi Y Applied Surface Science, 169, 752, 2001 |
| 4 |
Ion energy distribution at an r.f.-biased electrode in an inductively coupled plasma affected by collisions in a sheath Mizutani N, Hayashi T Thin Solid Films, 374(2), 167, 2000 |
| 5 |
Long term behavior of an axial-symmetric transmission gauge Akimichi H, Takeuchi K, Tuzi Y, Arakawa I Journal of Vacuum Science & Technology A, 17(4), 2021, 1999 |