검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Control of etch depth in patterned semiconductor substrates using real time spectroscopic ellipsometry Cho SJ, Snyder PG, Ianno NJ, Herzinger CM, Johs B Thin Solid Films, 455-56, 645, 2004 |
| No. | Article |
|---|---|
| 1 |
Control of etch depth in patterned semiconductor substrates using real time spectroscopic ellipsometry Cho SJ, Snyder PG, Ianno NJ, Herzinger CM, Johs B Thin Solid Films, 455-56, 645, 2004 |