검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
ITO Wet Etch Properties by Various Moving Modes of Substrate in an In-Line Wet Etch/Cleaning System Im SH, Cho ES, Kwon SJ Molecular Crystals and Liquid Crystals, 513, 114, 2009 |
| 2 |
Optimization of gas flow and etch depth uniformity for plasma etching of large area GaAs wafers Lee JW, Jung PG, Devre M, Westermann R, Pearton SJ Solid-State Electronics, 46(5), 685, 2002 |