검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Improved shape evolution of copper interconnects prepared by jet-stream etching Yeh TK, Tsai MH, Wang MY, Weng CK Journal of Applied Electrochemistry, 38(11), 1495, 2008 |
| 2 |
Anisotropic copper etching with monoethanolamine-complexed cupric ion solutions Shih CW, Wang YY, Wan CC Journal of Applied Electrochemistry, 33(5), 403, 2003 |