검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Surface cleanness of substrate transported by XHV integrated process Tosa M, Lee KS, Kim YS, Kasahara A, Yoshihara K Applied Surface Science, 169, 689, 2001 |
| 2 |
Development of the quadruple mass spectrometer with bessel-box type energy analyzer for the accurate measurement of partial pressures Takahashi N, Yanagishita K, Hayashi T, Akimichi H, Tuzi Y Applied Surface Science, 169, 752, 2001 |
| 3 |
Effect of the Cr-Rich Oxide Surface on Fast Pumpdown to Ultrahigh-Vacuum Chun I, Cho B, Chung S Journal of Vacuum Science & Technology A, 15(5), 2518, 1997 |