검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reduction of fluoride species and surface roughness by H-2 gas addition in SiC dry etching Mikami H, Horie Y, Hatayama T, Yano H, Uraoka Y, Fuyuki T Materials Science Forum, 483, 757, 2005 |
| No. | Article |
|---|---|
| 1 |
Reduction of fluoride species and surface roughness by H-2 gas addition in SiC dry etching Mikami H, Horie Y, Hatayama T, Yano H, Uraoka Y, Fuyuki T Materials Science Forum, 483, 757, 2005 |