검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma-reactive ion etching of InSb using CH4/H-2/Ar plasma Zhang GD, Sun WG, Xu SL, Zhao HY, Su HY, Wang HZ Journal of Vacuum Science & Technology A, 27(4), 681, 2009 |
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma-reactive ion etching of InSb using CH4/H-2/Ar plasma Zhang GD, Sun WG, Xu SL, Zhao HY, Su HY, Wang HZ Journal of Vacuum Science & Technology A, 27(4), 681, 2009 |