검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Electron-temperature control by varying dc voltage to a mesh grid covered by thin film in plasmas Kato K, Emi J, Iizuka S Thin Solid Films, 515(9), 4094, 2007 |
| 2 |
Nanocrystalline diamond deposition in electron-temperature-controlled CH4/H-2/Ar plasma Ikada R, Kato K, Abe T, Iizuka S Thin Solid Films, 506, 73, 2006 |
| 3 |
Production of high density and low electron-temperature plasma by a modified grid-biasing method using inductively coupled RF discharge Ikada R, Nishimura G, Kato K, Iizuka S Thin Solid Films, 457(1), 55, 2004 |