검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Preparation of ZrO2 ultrathin films as gate dielectrics by limited reaction sputtering - On growth delay time at initial growth stage Zhou Y, Kojima N, Sugiyama H, Ohara K, Sasaki K Applied Surface Science, 254(19), 6131, 2008 |