검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Growth of aluminum nitride on flat and patterned Si (111) by high temperature halide CVD Chubarov M, Mercier F, Lay S, Charlot F, Crisci A, Coindeau S, Encinas T, Ferro G, Reboud R, Boichot R Thin Solid Films, 623, 65, 2017 |
| 2 |
An integrated model for halide chemical vapor deposition of silicon carbide epitaxial films Wang R, Ma RH Journal of Crystal Growth, 310(18), 4248, 2008 |
| 3 |
Kinetics of halide chemical vapor deposition of silicon carbide film Wang R, Ma RH Journal of Crystal Growth, 308(1), 189, 2007 |