검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of sputtering-gas pressure on properties of silicon nitride films produced by helicon plasma sputtering Li WT, McKenzie DR, McFall WD, Zhang QC Thin Solid Films, 384(1), 46, 2001 |
| 2 |
Preparation of highly oriented AlN thin films on glass substrates by helicon plasma sputtering and design of experiments Akiyama M, Harada T, Xu CN, Nonaka K, Watanabe T Thin Solid Films, 350(1-2), 85, 1999 |