검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigation of surface polymerization on silicon exposed to C4F8 helicon wave plasmas Lee WJ, Kim HS, Yeom GY, Baek JT Thin Solid Films, 341(1-2), 184, 1999 |
| No. | Article |
|---|---|
| 1 |
Investigation of surface polymerization on silicon exposed to C4F8 helicon wave plasmas Lee WJ, Kim HS, Yeom GY, Baek JT Thin Solid Films, 341(1-2), 184, 1999 |