검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Submicron dry-etching behavior of beta-FeSi2 thin films towards fabrication of photonic crystals Imai A, Kunimatsu S, Akiyama K, Terai Y, Maeda Y Thin Solid Films, 515(22), 8162, 2007 |
| No. | Article |
|---|---|
| 1 |
Submicron dry-etching behavior of beta-FeSi2 thin films towards fabrication of photonic crystals Imai A, Kunimatsu S, Akiyama K, Terai Y, Maeda Y Thin Solid Films, 515(22), 8162, 2007 |