검색결과 : 1건
No. | Article |
---|---|
1 |
Enhancement of moisture resistance of spin-on low-k HSQ films by hot wire generated atomic hydrogen treatment Kumbhar AA, Singh SK, Dusane RO Thin Solid Films, 501(1-2), 329, 2006 |
No. | Article |
---|---|
1 |
Enhancement of moisture resistance of spin-on low-k HSQ films by hot wire generated atomic hydrogen treatment Kumbhar AA, Singh SK, Dusane RO Thin Solid Films, 501(1-2), 329, 2006 |