화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 Patterning the mechanical properties of hydrogen silsesquioxane films using electron beam irradiation for application in mechano cell guidance
Lanniel M, Lu BR, Chen YF, Allen S, Buttery L, Williams P, Huq E, Alexander M
Thin Solid Films, 519(6), 2003, 2011
2 Thermal Properties of New Bismaleimide Resins Containing Hydrogen Silsesquioxane and Diallyl Bisphenol A
Huang FW, Huang FR, Zhou Y, Du L
Journal of Applied Polymer Science, 117(5), 2932, 2010
3 The comparative study of thermal stability among silicon dioxide, fluorinated silicate glass, hydrogen silsesquioxane, and organosilicate glass dielectrics on silicon
Jeng JS, Chen JS
Thin Solid Films, 516(18), 6013, 2008
4 Realization of various sub-micron metal patterns using room temperature nanoimprint lithography
Sung JH, Lee MW, Lee SG, Park SG, Lee EH, O BH
Thin Solid Films, 515(12), 5153, 2007
5 Transformation of hydrogen silsesquioxane properties with RIE plasma treatment for advanced multiple-gate MOSFETs
Penaud J, Fruleux F, Dubois E
Applied Surface Science, 253(1), 395, 2006
6 Positronium diffusion in porous oxide thin films
Ito K, Kobayashi Y
Materials Science Forum, 445-6, 307, 2004
7 Positronium time-of-flight measurements of porous silsesquioxane films
Yu RS, Kobayashi Y, Ohdaira T, Suzuki R, Ito K, Hirata K, Sato K
Materials Science Forum, 445-6, 361, 2004
8 Study the impact of liner thickness on the 0.18 mu m devices using low dielectric constant hydrogen silsesquioxane as the interlayer dielectric
Lan JK, Wang YL, Wu YL, Liou HC, Wang JK, Chiu SY, Cheng YL, Feng MS
Thin Solid Films, 377-378, 776, 2000