검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of dopant concentration and type of substrate on the local organization of low-pressure chemical vapour deposition in situ boron doped silicon films from silane and boron trichloride Caussat B, Scheid E, de Mauduit B, Berjoan R Thin Solid Films, 446(2), 218, 2004 |