검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of Additives in Organic Acid Solutions for Post-CMP Cleaning on Polymer Low-k Fluorocarbon Gu X, Nemoto T, Teramoto A, Ito T, Ohmi T Journal of the Electrochemical Society, 156(6), H409, 2009 |
| 2 |
Design for electron beam: A novel approach to electron beam direct writing throughput enhancement for volume production Maruyama T, Machida Y, Sugatani S, Tsuchikawa H, Hoshino H, Ito M, Tago H, Chau LL, Lee S, Komami H Journal of Vacuum Science & Technology B, 27(6), 2532, 2009 |