검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Compositional depth profiling of ultrathin oxynitride/Si interface using XPS Kato H, Nishizaki K, Takahashi K, Nohira H, Tamura N, Hikazutani K, Sano S, Hattori T Applied Surface Science, 190(1-4), 39, 2002 |
| No. | Article |
|---|---|
| 1 |
Compositional depth profiling of ultrathin oxynitride/Si interface using XPS Kato H, Nishizaki K, Takahashi K, Nohira H, Tamura N, Hikazutani K, Sano S, Hattori T Applied Surface Science, 190(1-4), 39, 2002 |