화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist
Winston D, Cord BM, Ming B, Bell DC, DiNatale WF, Stern LA, Vladar AE, Postek MT, Mondol MK, Yang JKW, Berggren KK
Journal of Vacuum Science & Technology B, 27(6), 2702, 2009
2 On the influence of the sputtering in determining the resolution of a scanning ion microscope
Castaldo V, Hagen CW, Kruit P, van Veldhoven E, Maas D
Journal of Vacuum Science & Technology B, 27(6), 3196, 2009
3 Toroidal spectrometer for signal detection in scanning ion/electron microscopes
Hoang HQ, Khursheed A
Journal of Vacuum Science & Technology B, 27(6), 3226, 2009
4 Understanding imaging modes in the helium ion microscope
Scipioni L, Sanford CA, Notte J, Thompson B, McVey S
Journal of Vacuum Science & Technology B, 27(6), 3250, 2009