검색결과 : 1건
No. | Article |
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1 |
The mechanism of alumina formation from TMA and molecular oxygen using catalytic-CVD with an iridium catalyzer Ogita YI, Tomita T Thin Solid Films, 501(1-2), 35, 2006 |
No. | Article |
---|---|
1 |
The mechanism of alumina formation from TMA and molecular oxygen using catalytic-CVD with an iridium catalyzer Ogita YI, Tomita T Thin Solid Films, 501(1-2), 35, 2006 |