검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High-rate synthesis of microcrystalline silicon films using high-density SiH4/H-2 microwave plasma Jia HJ, Saha JK, Ohse N, Shirai H Thin Solid Films, 515(17), 6713, 2007 |
| 2 |
Defect characterization in 3C-SiC films grown on thin and thick silicon top layers of SIMOX Hong MH, Chung J, Namavar F, Pirouz P Materials Science Forum, 338-3, 525, 2000 |