화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Backside and frontside depth profiling of B delta doping, at low energy, using new and previous magnetic SIMS instruments
Laugier F, Hartmann JM, Moriceau H, Holliger P, Truche R, Dupuy JC
Applied Surface Science, 231-2, 668, 2004
2 Comparison between Xe+ and O-2(+) primary ions, at low impact energy, on B delta-doping, SiGe-Si superlattice and Al/Ti multilayer structures
Laugier F, Holliger P, Dupuy JC, Baboux N
Applied Surface Science, 203, 348, 2003