검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effects of plasma treatments on structural and electrical properties of methyl-doped silicon oxide low dielectric constant film Leong WY, Tsang CF, Li HY, Bliznetsov V, Wong LY, Li WH Thin Solid Films, 496(2), 402, 2006 |
| 2 |
SIMS study of Cu trapping and migration in low-k dielectric films Li YP, Hunter J, Tate TJ Applied Surface Science, 231-2, 791, 2004 |