검색결과 : 39건
| No. | Article |
|---|---|
| 1 |
Influence of porosity and pore size on sputtering of nanoporous structures by low-energy Ar ions: Molecular dynamics study Sycheva AA, Voronina EN, Rakhimova TV, Rakhimov AT Applied Surface Science, 475, 1021, 2019 |
| 2 |
Comparison of various low dielectric constant materials Cheng YL, Lee CY, Hung WJ, Chen GS, Fang JS Thin Solid Films, 660, 871, 2018 |
| 3 |
The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass (SiCOH) as measured with electron-spin resonance Xue PP, Pei DF, Zheng HF, Li WY, Afanas'ev VV, Baklanov MR, de Marneffe JF, Lin YH, Fung HS, Chen CC, Nishi Y, Shohet JL Thin Solid Films, 616, 23, 2016 |
| 4 |
Study of Al2O3 nanolayers synthesized onto porous SiO2 using X-ray reflection spectroscopy Konashuk AS, Sokolov AA, Drozd VE, Schaefers F, Filatova EO Thin Solid Films, 534, 363, 2013 |
| 5 |
Photo-patternable fluorinated polyhedral oligomeric silsequioxane-functionalized (POSS-F) polymeric materials with ultra low dielectric constants Vasilopoulou M, Douvas AM, Argitis P Materials Chemistry and Physics, 135(2-3), 880, 2012 |
| 6 |
Charging response of back-end-of-the-line barrier dielectrics to VUV radiation Sinha H, Lauer JL, Antonelli GA, Nishi Y, Shohet JL Thin Solid Films, 520(16), 5300, 2012 |
| 7 |
Application of scatterometric porosimetry to characterize porous ultra low-k patterned layers Licitra C, Bouyssou R, El Kodadi M, Haberfehlner G, Chevolleau T, Hazart J, Virot L, Besacier M, Schiavone P, Bertin F Thin Solid Films, 519(9), 2825, 2011 |
| 8 |
Synthesis of poly(meta-diethynyl benzene) with initiated chemical vapour deposition Bakker R, Weijers P, Spee DA, van Steenbergen MJ, van der Werf CHM, Rath JK, Schropp REI Thin Solid Films, 519(14), 4418, 2011 |
| 9 |
Effect of the dielectric-substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics Sinha H, Sehgal A, Ren H, Nichols MT, Tomoyasu M, Russell NM, Nishi Y, Shohet JL Thin Solid Films, 519(16), 5464, 2011 |
| 10 |
Influence of the ion bombardment of O-2 plasmas on low-k materials Verdonck P, Samara V, Goodyear A, Ferchichi A, Van Besien E, Baklanov MR, Braithwaite N Thin Solid Films, 520(1), 464, 2011 |