화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Achieving a SiGeHBT epitaxial emitter with novel low thermal budget technique
Brabant P, Wen JQ, Italiano J, Landin T, Cody N, Haen L
Applied Surface Science, 224(1-4), 347, 2004
2 Novel polysilicon gate engineering with a laser thermal process for sub-40 nm CMOS devices
Yamamoto T, Okabe K, Kubo T, Goto K, Morioka H, Wang Y, Lin T, Talwar S, Kase M, Sugii T
Solid-State Electronics, 48(10-11), 1837, 2004
3 Solid Source Diffusion from Agglomerating Silicide Sources .2. Experimental Results and Analysis
Tsai JY, Osburn CM, Canovai CA
Journal of Vacuum Science & Technology B, 12(6), 3149, 1994