검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Turbomolecular pump rotor-bearing system analysis and testing Chiang HWD, Kuan CP, Li HL Journal of Vacuum Science & Technology A, 27(5), 1196, 2009 |
| 2 |
The influence of external load and air pressure on air slide table performance of ultraprecision machines in nanomachining Vahdati M, Vahdati N Journal of Vacuum Science & Technology B, 27(4), 1989, 2009 |