검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Formation of ZnO nanostructures in energy-controlled hollow-type magnetron RF plasma Kumeta K, Ono H, Iizuka S Thin Solid Films, 518(13), 3522, 2010 |
| 2 |
Growth of ZnO nanowires in hollow-type magnetron O-2/Ar RF plasma Ono H, Iizuka S Thin Solid Films, 518(3), 1016, 2009 |
| 3 |
Oxygen active species in an Ar-O-2 magnetron discharge for titanium oxide deposition Vancoppenolle V, Jouan PY, Ricard A, Wautelet M, Dauchot JP, Hecq M Applied Surface Science, 205(1-4), 249, 2003 |
| 4 |
Hollow cathode magnetrons with target gas feed Bradley JW, Willett DM, Gonzalvo YA Journal of Vacuum Science & Technology A, 17(6), 3333, 1999 |
| 5 |
Study of platinum electrode patterning in a reactive ion etcher Chang LH, Apen E, Kottke M, Tracy C Journal of Vacuum Science & Technology A, 16(3), 1489, 1998 |
| 6 |
SiO2 etching characteristics in DC magnetron plasmas by using an external magnetic held Yamada H, Kuwahara K, Fujiyama H Thin Solid Films, 316(1-2), 6, 1998 |
| 7 |
Directional and Preferential Sputtering-Based Physical Vapor-Deposition Rossnagel SM Thin Solid Films, 263(1), 1, 1995 |