검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Integrated aluminum nitride piezoelectric microelectromechanical system for radio front ends Piazza G Journal of Vacuum Science & Technology A, 27(4), 776, 2009 |
| 2 |
Microelectromechanical systems motion measurement and modal analysis based on Doppler interferometry Zhang GX, Zhong Y, Hong X, Leng CL Journal of Vacuum Science & Technology B, 27(3), 1251, 2009 |
| 3 |
Strong exciton-photon coupling in ZnO based resonators Sturm C, Hilmer H, Schmidt-Grund R, Czekalla C, Sellmann J, Lenzner J, Lorenz M, Grundmann M Journal of Vacuum Science & Technology B, 27(3), 1726, 2009 |
| 4 |
Fabrication strategies for filter banks based on microring resonators Holzwarth CW, Amatya R, Dahlem M, Khilo A, Kartner FX, Ippen EP, Ram RJ, Smith HI Journal of Vacuum Science & Technology B, 26(6), 2164, 2008 |
| 5 |
Electrothermal actuation studies on silicon carbide resonators Mastropaolo E, Cheung R Journal of Vacuum Science & Technology B, 26(6), 2619, 2008 |