검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Reaction of Si with excited nitrogen species in pure nitrogen plasma near atmospheric pressure Hayakawa R, Yoshimura T, Ashida A, Uehara T, Fujimura N Thin Solid Films, 506, 423, 2006 |
| 2 |
Scanning tunneling microscopy/scanning tunneling spectroscopy of initial nitridation process of Si(100)-2 x 1 surfaces Matsushita D, Ikeda H, Sakai A, Zaima S, Yasuda Y Thin Solid Films, 369(1-2), 293, 2000 |