검색결과 : 1건
No. | Article |
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1 |
Peculiarities of preparing a-SiC : H films from methyltrichlorosilane Rusakov GV, Ivashchenko LA, Ivashchenko VI, Porada OK Applied Surface Science, 184(1-4), 128, 2001 |
No. | Article |
---|---|
1 |
Peculiarities of preparing a-SiC : H films from methyltrichlorosilane Rusakov GV, Ivashchenko LA, Ivashchenko VI, Porada OK Applied Surface Science, 184(1-4), 128, 2001 |