검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching of GaAs suspended photonic crystal cavities Braive R, Le Gratiet L, Guilet S, Patriarche G, Lemaitre A, Beveratos A, Robert-Philip I, Sagnes I Journal of Vacuum Science & Technology B, 27(4), 1909, 2009 |
| 2 |
Low-roughness active microdisk resonators fabricated by focused ion beam Barea LAM, Vallini F, Vaz AR, Mialichi JR, Frateschi NC Journal of Vacuum Science & Technology B, 27(6), 2979, 2009 |
| 3 |
Advanced silicon processing for active planar photonic devices Shearn M, Diest K, Sun XK, Zadok A, Atwater H, Yariv A, Scherer A Journal of Vacuum Science & Technology B, 27(6), 3180, 2009 |
| 4 |
Fabrication strategies for filter banks based on microring resonators Holzwarth CW, Amatya R, Dahlem M, Khilo A, Kartner FX, Ippen EP, Ram RJ, Smith HI Journal of Vacuum Science & Technology B, 26(6), 2164, 2008 |
| 5 |
Optical characterization of a hydrogen silsesquioxane lithography process Samarelli A, Macintyre DS, Strain MJ, De La Rue RM, Sorel M, Thoms S Journal of Vacuum Science & Technology B, 26(6), 2290, 2008 |
| 6 |
Spin coating and plasma process for 2.5D integrated photonics on multilayer polymers Zebda A, Camberlein L, Beche B, Gaviot E, Beche E, Duval D, Zyss J, Jezequel G, Solal F, Godet C Thin Solid Films, 516(23), 8668, 2008 |