검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Comparison of ordered structure in buried oxide layers in high-dose, low-dose, and internal-thermal-oxidation separation-by-implanted-oxygen wafers Shimura T, Fukuda K, Yasutake K, Hosoi T, Umeno M Thin Solid Films, 476(1), 125, 2005 |