검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Oxygen radical irradiation effect in reactive magnetron sputtering for orientation selective epitaxial growth of CeO2(100) layers on Si(100) substrates Inoue T, Shida S, Kato K Journal of Crystal Growth, 289(2), 534, 2006 |
| 2 |
Orientation selective epitaxial growth of CeO2 layers on Si(100) substrates using reactive DC magnetron sputtering with substrate bias Inoue T, Ohashi M, Sakamoto N, Shida S Journal of Crystal Growth, 271(1-2), 176, 2004 |