검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Oxygen flooding and sample cooling during depth profiling of HfSiON thin films Miwa S Applied Surface Science, 255(4), 1384, 2008 |
| 2 |
Roughness development in the depth profiling with 500 eV O-2(+) beam with the combination of oxygen flooding and sample rotation Gui D, Xing ZX, Huang YH, Mo ZQ, Hua YN, Zhao SP, Cha LZ Applied Surface Science, 255(4), 1433, 2008 |
| 3 |
Sub-keV secondary ion mass spectrometry depth profiling: comparison of sample rotation and oxygen flooding Liu R, Wee ATS Applied Surface Science, 231-2, 653, 2004 |
| 4 |
SIMS backside depth profiling of ultra shallow implants Yeo KL, Wee ATS, See A, Liu R, Ng CM Applied Surface Science, 203, 335, 2003 |
| 5 |
Investigating oxygen flooding at oblique 2 and 1 keV oxygen sputtering for microelectronics support applications Jahnel F, von Criegern R Applied Surface Science, 203, 367, 2003 |