화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Optimization of ohmic contact for AlGaNGaN HEMT by introducing patterned etching in ohmic area
Wang C, Zhao MD, He YL, Zheng XF, Wei XX, Mao W, Ma XH, Zhang JC, Hao Y
Solid-State Electronics, 129, 114, 2017
2 Micro-fabrication of patterned LSCF thin-film cathodes with gold current collectors
Simrick NJ, Kilner JA, Atkinson A, Rupp JLM, Ryll TM, Bieberle-Hutter A, Galinski H, Gauckler LJ
Solid State Ionics, 192(1), 619, 2011
3 Control of etch depth in patterned semiconductor substrates using real time spectroscopic ellipsometry
Cho SJ, Snyder PG, Ianno NJ, Herzinger CM, Johs B
Thin Solid Films, 455-56, 645, 2004