검색결과 : 1건
No. | Article |
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1 |
Reduction of perfluorocompound emissions by microwave plasma-torch Hong YC, Kim HS, Uhm HS Thin Solid Films, 435(1-2), 329, 2003 |
No. | Article |
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1 |
Reduction of perfluorocompound emissions by microwave plasma-torch Hong YC, Kim HS, Uhm HS Thin Solid Films, 435(1-2), 329, 2003 |