검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Integrated process of photoresist trimming and dielectric hard mask etching for sub-50 nm gate patterning Bliznetsov V, Kumar R, Lin HZ, Ang KW, Yoo WJ, Du AY Thin Solid Films, 504(1-2), 117, 2006 |
| 2 |
Effect of halogen in high-density oxygen plasmas on photoresist trimming Sin CY, Chen BH, Loh WL, Yu J, Yelehanka P, See A, Chan L AIChE Journal, 50(7), 1578, 2004 |