화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Modelling of group-III nitride MOVPE in the closed coupled showerhead reactor and Planetary Reactor (R)
Martin C, Dauelsberg M, Protzmann H, Boyd AR, Thrush EJ, Heuken M, Talalaev RA, Yakovlev EV, Kondratyev AV
Journal of Crystal Growth, 303(1), 318, 2007
2 Real time monitoring of layer growth on planetary reactor((R)) by reflectance-anisotropy-spectroscopy
Habets N, Schmitt T, Deufel M, Lunenburger M, Heuken M, Juergensen H
Thin Solid Films, 409(1), 43, 2002