검색결과 : 2건
No. | Article |
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1 |
Application of microscale plasma to material processing Ito T, Izaki T, Terashima K Thin Solid Films, 386(2), 300, 2001 |
2 |
Multiple microscale plasma CVD apparatuses on a substrate Ito T, Terashima K Thin Solid Films, 390(1-2), 234, 2001 |