검색결과 : 1건
No. | Article |
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1 |
Synthesis of SiO2 and SiOxCyHz thin films by microwave plasma CVD Barranco A, Cotrino J, Yubero F, Espinos JP, Benitez J, Clerc C, Gonzalez-Elipe AR Thin Solid Films, 401(1-2), 150, 2001 |
No. | Article |
---|---|
1 |
Synthesis of SiO2 and SiOxCyHz thin films by microwave plasma CVD Barranco A, Cotrino J, Yubero F, Espinos JP, Benitez J, Clerc C, Gonzalez-Elipe AR Thin Solid Films, 401(1-2), 150, 2001 |