검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Improvement of process parameters for polycrystalline silicon carbide low pressure chemical vapor deposition on 150 mm silicon substrate using monomethylsilane as precursor Ajayakumar A, Maruthoor S, Fuchs T, Rohlfing F, Jakovlev O, Wilde J, Reinecke H Thin Solid Films, 536, 94, 2013 |
| 2 |
Growth and characterization of SiC layers obtained by microwave-CVD Mandracci P, Ferrero S, Cicero G, Giorgis F, Pirri CF, Barucca G, Reitano R, Musumeci P, Calcagno L, Foti G Thin Solid Films, 383(1-2), 169, 2001 |
| 3 |
SiC MEMS: opportunities and challenges for applications in harsh environments Mehregany M, Zorman CA Thin Solid Films, 355-356, 518, 1999 |