화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Microstructure and gas permeation performance of porous silicon nitride ceramics with unidirectionally aligned channels
Li XQ, Yao DX, Zuo KH, Xia YF, Yin JW, Liang HQ, Zeng YP
Journal of the American Ceramic Society, 103(11), 6565, 2020
2 Controlled porosity in silicon nitride
Redington W, Lonergan J, le Gonidec G, Diaz A, Bilgen H, Hampshire S
Materials Science Forum, 383, 19, 2002
3 Study of Surface-Reactions During Plasma-Enhanced Chemical-Vapor-Deposition of SiO2 from SiH4, O-2, and Ar Plasma
Han SM, Aydil ES
Journal of Vacuum Science & Technology A, 14(4), 2062, 1996