화학공학소재연구정보센터
검색결과 : 12건
No. Article
1 Preferential sputtering effects in depth profiling of multilayers with SIMS, XPS and AES
Hofmann S, Zhou G, Kovac J, Drev S, Lian SY, Lin B, Liu Y, Wang JY
Applied Surface Science, 483, 140, 2019
2 Prediction and experimental determination of the layer thickness in SIMS depth profiling of Ge/Si multilayers: Effect of preferential sputtering and atomic mixing
Lian SY, Kim KJ, Kim TG, Hofmann S, Wang JY
Applied Surface Science, 481, 1103, 2019
3 Depth resolution and preferential sputtering in depth profiling of delta layers
Hofmann S, Lian SY, Han YS, Liu Y, Wang JY
Applied Surface Science, 455, 1045, 2018
4 Correlation of depth resolution and preferential sputtering in depth profiles of thin layers by Secondary Ion Mass Spectrometry (SIMS)
Hofmann S, Lian SY, Han YS, Deng QR, Wang JY
Thin Solid Films, 662, 165, 2018
5 Depth resolution and preferential sputtering in depth profiling of sharp interfaces
Hofmann S, Han YS, Wang JY
Applied Surface Science, 410, 354, 2017
6 Understanding the effects of sputter damage in W-S thin films by HAXPES
Sundberg J, Lindblad R, Gorgoi M, Rensmo H, Jansson U, Lindblad A
Applied Surface Science, 305, 203, 2014
7 Low energy Ar-ion bombardment effects on the CeO2 surface
Wang GD, Kong DD, Pan YH, Pan HB, Zhu JF
Applied Surface Science, 258(6), 2057, 2012
8 Formation of self-organized nanostructures on semi-insulating InP by 100 keV Ar+-ion irradiation
Mohanty JR, Basu T, Kanjilal D, Som T
Applied Surface Science, 258(9), 4139, 2012
9 Composition of the sputter deposited W-Ti thin films
Bundaleski N, Petrovic S, Perusko D, Kovac J, Zalar A
Applied Surface Science, 254(20), 6390, 2008
10 Time dependent preferential sputtering in the HfO2 layer on Si(100)
Chang SJ, Lee WC, Hwang J, Hong M, Kwo J
Thin Solid Films, 516(6), 948, 2008