검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma/reactor walls interactions in advanced gate etching processes Ramos R, Cunge G, Joubert O, Sadeghi N, Mori M, Vallier L Thin Solid Films, 515(12), 4846, 2007 |
| No. | Article |
|---|---|
| 1 |
Plasma/reactor walls interactions in advanced gate etching processes Ramos R, Cunge G, Joubert O, Sadeghi N, Mori M, Vallier L Thin Solid Films, 515(12), 4846, 2007 |