검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dynamics of plasma-surface interactions and feature profile evolution during pulsed plasma etching Ono K, Tuda M Thin Solid Films, 374(2), 208, 2000 |
| No. | Article |
|---|---|
| 1 |
Dynamics of plasma-surface interactions and feature profile evolution during pulsed plasma etching Ono K, Tuda M Thin Solid Films, 374(2), 208, 2000 |