검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Amorphous silicon carbon films prepared by hybrid plasma enhanced chemical vapor/sputtering deposition system: Effects of r.f. power Rashid NMA, Ritikos R, Othman M, Khanis NH, Ab Gani SM, Muhamad MR, Rahman SA Thin Solid Films, 529, 459, 2013 |