검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Epitaxial growth of heavily B-doped SiGe films and interfacial reaction of Ti/B-doped SiGe bilayer structure using rapid thermal processing Okada M, Kamioka H, Matsuo H, Fukuda Y, Zaima S, Kawamura K, Yasuda Y Thin Solid Films, 369(1-2), 130, 2000 |